- Applicable Wafer Size:
- For 300 mm Wafer
- Number Of Axes And Seal Type:
- One Axis Bellows
- Valve Type:
- Cassette Type (Half MESK)
- Opening Window Size:
- 50X336 mm
- Gate Seal Material:
- FKM
- Auto Switch And The Connector:
- Auto Switch:D-A93
- End Lock:
- OPEN/CLOSE End Lock